发明名称 |
Polishing pad and method of producing same |
摘要 |
A transparent pad having a polishing surface with an average surface roughness of 5 mum or less is used as a polishing pad. An indentation is formed on the back surface of the transparent pad such that its rate of light transmission is locally changed. The transparent pad has a rate of light transmission equal to or greater than 10% or preferably 30% for light of at least one wavelength in the range of 350 nm-900 nm.
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申请公布号 |
US7238097(B2) |
申请公布日期 |
2007.07.03 |
申请号 |
US20040010199 |
申请日期 |
2004.12.10 |
申请人 |
NIHON MICROCOATING CO., LTD. |
发明人 |
OHNO HISATOMO;IZUMI TOSHIHIRO;SAITO MITSURU;NAGAMINE TAKUYA;MILLER CLAUGHTON;KODAKA ICHIRO |
分类号 |
B24B37/00;B24D11/00;B24B37/04;B24D13/14;H01L21/304 |
主分类号 |
B24B37/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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