| 摘要 |
An apparatus for transferring a wafer carrier having a carrier sensor is provided to prevent an accident due to separation of a mounted wafer during a carrier transfer apparatus operation by employing at least one carrier sensor for detecting the mounted wafer. A transfer arm module has a carrier mounting unit and carrier sensors(112-1,112-2). The carrier mounting unit mounts a wafer carrier. The carrier sensors detect whether or not the wafer carrier is mounted on the carrier mounting unit. A control unit determines whether or not the wafer carrier is normally mounted through the carrier sensors. At least one longitudinal receiving groove(111) is formed on an upper end of the carrier mounting unit of the transfer arm module to receive the carrier. The carrier sensors are respectively formed on inner sides near ends of both places of the receiving groove.
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