发明名称 Method of fabricating a write element with a reduced yoke length
摘要 A head including a write element for writing data to a magnetic media, and methods for its production are provided. A write element of the invention includes one or more of a recessed first pole, a heat sink layer, and a shortened yoke length. A method of the invention provides forming an anti-reflective layer before forming a mask layer. During photolithography the anti-reflective layer suppresses undesirable reflections off of features, such as vertical sidewalls, that otherwise limit how closely to such features portions of the mask layer can be formed.
申请公布号 US7238292(B1) 申请公布日期 2007.07.03
申请号 US20040909224 申请日期 2004.07.30
申请人 WESTERN DIGITAL (FREMONT), INC. 发明人 HE LI;ZHAO MING;HU YINING
分类号 B44C1/00;G11B5/127 主分类号 B44C1/00
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