VACCUM PUMP OF SEMICONDUCTOR EQUPIMENT

摘要

A vacuum pump of semiconductor equipment is provided to suppress the generation of powder due to a rapid change of temperature by maintaining constantly internal temperature in an off-state thereof. A vacuum pump(30) of semiconductor equipment includes a cooling line(50) for cooling high temperature thereof. A heater(60) is installed inside the vacuum pump in order to maintain constantly the temperature of the vacuum pump when the vacuum pump is stopped. The heater is operated only when the vacuum pump is stopped and cooling water is not supplied through the cooling line. An automatic temperature controller(64) is connected to a power line. A switch(66) is installed at an end of the power line in order to turn on/off the heater.