APPARATUS FOR PREVENTION INCREASING INNER PRESSURE OF DRY SCRUBBER CANISTER

摘要

An apparatus for preventing inner pressure rising of a dry scrubber canister is provided to extend the lifetime of an absorbent and to prevent pump trouble by removing the blocking of powder in the try scrubber canister. An absorbent(110) gap-fills a canister(100) to process poisonous gas generated in a semiconductor process. A driving motor(400) is strongly fixed on a lower end of the canister by a fixing bracket(420). A circular base bar(430) is fixed on a rotational shaft of the driving motor and installed in the canister. Plural scrapers(300) are vertically fixed on the base bar and arranged in all directions. The driving motor is driven by a timer. A pressure sensor or a pressure gage detecting internal pressure is installed in the canister. The driving motor is driven according to a detected value of the pressure sensor or the pressure gage.