发明名称 Method for removing oxides from a Ge semiconductor substrate surface
摘要 This invention relates to a method for removing oxides from the surface of a Ge semiconductor substrate comprising the step of subjecting the surface to a Ge oxide etching solution characterized in that the Ge oxide etching solution removes Ge oxides and Ge sub-oxides from the surface.
申请公布号 US7238291(B2) 申请公布日期 2007.07.03
申请号 US20040943494 申请日期 2004.09.17
申请人 INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM (IMEC) 发明人 ONSIA BART;TEERLINCK IVO
分类号 H01L21/306;H01L21/311 主分类号 H01L21/306
代理机构 代理人
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