SOURCE CANISTER TEMP CONTROL UNIT AND THIN FILM DEPOSITION APPARATUS USING THE SAME

摘要

A unit for adjusting a temperature of a source canister and a thin film deposition apparatus using the same are provided to maintain a state of a source supplied to a chamber, thereby enhancing a process yield of the apparatus. A source canister(110) for storing a source used in a deposition process is enclosed by a water bath tubing(120) for circulating water bath. A sensor(130) is installed in the water bath tubing to detect a temperature of the water bath. A thermal module(10) is disposed closely adjacent to the water bath tubing to absorb or radiate the heat from the water bath. A controller(140) is connected to the sensor and the thermo module to control operation of the thermo module.