| 摘要 |
An apparatus and a method for detecting an error of transfer system are provided to prevent damage of a substrate during a transfer process by displaying the error of the transfer system. Plural reflective marks(201-204) are symmetrically arranged at both sides of a test substrate(200) at the same interval. A light emitting unit(320) generates light to irradiate it to the test substrate that is transferred on a transfer system(100). A light emitting unit(330) receives the light reflected from the reflective mark of the test substrate. A control unit(340) detects an error of the transfer system on the basis of reflective time difference of the reflective lights reflected by the neighboring reflective masks and received through the light receiving unit. A display unit(350) displays the error of the transfer system detected by the control unit.
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