| 发明名称 |
OXIDE FILM, LAMINATE AND METHODS FOR THEIR PRODUCTION |
| 摘要 |
A method for forming an oxide film on a substrate by a sputtering process using a target comprising a metal as the main component, wherein sputtering is carried out in an atmosphere which contains a gas containing carbon atoms. |
| 申请公布号 |
CA2202430(C) |
申请公布日期 |
2007.07.03 |
| 申请号 |
CA19972202430 |
申请日期 |
1997.04.11 |
| 申请人 |
ASAHI GLASS COMPANY LTD. |
发明人 |
AOMINE, NOBUTAKA;HAYASHI, YASUO;TAKAKI, SATORU;EBISAWA, JUNICHI |
| 分类号 |
C23C14/08;B32B15/04;C03C17/22;C03C17/245;C03C17/34;C03C17/36;C23C14/00;C23C14/06;C23C28/00;G02F1/1343 |
主分类号 |
C23C14/08 |
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