| 摘要 |
A high frequency inductor manufacturing method is provided to adjust mutual inductance to be generated in a coil portion by partially or wholly selecting plural coils to induce inductance in the coils, without changing a size of an inductor. A first insulation film(210) is deposited. After a first groove is formed on the first insulation layer, the first groove is filled with conductive material to form a first coil(220), through which first current flows. A second insulation layer is deposited on the first insulation layer. After a second groove is formed on the second insulation layer, the second groove is filled with conductive material to form a second coil, through which second current flows.
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