摘要 |
A magnetron is provided to improve stability thereof by shielding leakage of components of 2 harmonics, 3 harmonics, and 4 harmonics except for components of 5 harmonics. A yoke(301) includes an upper yoke(301a), a lower yoke(301b), and an internal space formed by the upper and lower yokes. An upper magnet(321) and a lower magnet(322) are installed in the internal space of the yoke and are fixed to internal surfaces of the upper and lower yokes. An anode cylinder(302) is disposed in a space between the upper and lower magnets in order to generate high-frequency energy. An upper pole piece(313) and a lower pole piece(314) are disposed at an upper opening and a lower opening of the anode cylinder. An A-seal(315) is disposed at an upper side of the upper pole piece and has a bent part for shielding leakage of 5 harmonics. A choke filter is disposed at a lower side of the bent part along a height direction of the A-seal and is attached to an inner surface of the A-seal in order to shield leakage of harmonics except for 5 harmonics.
|