| 摘要 |
A wafer alignment apparatus in a wafer transfer station is provided to sense and compensate the status of wafer alignment when buffering a wafer transmission for loading the wafer. A wafer transfer station apparatus comprises a spray box(100) for a wafer transfer system and a slot(110) formed into the spray box. A wafer sensing sensor(120) senses a loading status of the wafer, and is installed inner circumference of the slot. An align correction guard(130) is installed at a side end of the spray box, so as to push the wafer into the slot, according to a signal of the wafer sensing sensor.
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