| 摘要 |
An error detecting apparatus and a method in a transfer system are provided to check easily errors of the transfer system and to prevent the damage of a substrate under a transfer process by detecting automatically the errors of the transfer system and making the errors displayed in real time using a control unit. An error detecting apparatus includes a light emitting unit(220) for irradiating light to a transfer system, a light receiving unit(230) for receiving the light reflected from the transfer system, a control unit, and a display unit. The control unit(260) is used for controlling the light irradiation of the light emitting unit and detecting the dislocation of the transfer system. The display unit(270) is used for displaying the dislocation of the transfer system detected by the control unit.
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