发明名称 ALIGNING APPARATUS FOR POSITION CONTROL
摘要 An aligning apparatus for position control is provided to enhance aligning accuracy by controlling movements in X, Y, and theta axes on a single plane at the same time. A aligning apparatus for position control includes a control unit(110), alignment control units(120a,120b,120c), a driver(130), and an elastic unit(140). The control unit is implemented on a base unit and fixes an aligning unit. The alignment control units include first to third micrometer type aligning units. End sides of the alignment control units are attached to a side surface of the control unit. Two of the aligning units are arranged on an X axis, while the other is arranged on a Y axis. The driver controls the alignment control units. The elastic unit is coupled with the control unit and provides an elastic vector force corresponding to the operation of the alignment control units.
申请公布号 KR20070068618(A) 申请公布日期 2007.07.02
申请号 KR20050130446 申请日期 2005.12.27
申请人 ESE CO., LTD. 发明人 JEONG, HO SEOK
分类号 H05K13/04 主分类号 H05K13/04
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