| 摘要 |
<p>[PROBLEMS] A non-contact type suction holding device that sucks and holds a plate-like member in a non-contact state in which that portion (major portion) of the member which excludes the peripheral edge of the member is allowed to float relative to a suction table. The plate-like member can be reliably held without damage to its surface. [MEANS FOR SOLVING PROBLEMS] In a non-contact type suction holding device (1), a Bernoulli suction means (10) that produces negative pressure by jetting of air (gas) is provided on a suction table (2). A wafer (plate-like member)(W) is placed at its lower surface edge on the suction table (2) and held by the Bernoulli suction means (10) with that portion (major portion) of the wafer (W) which excludes the peripheral edge of the wafer (W) allowed to float relative to the suction table (2), and this way the wafer (W) is held relative to the suction table (2) without contact. Further, a pressing means is provided in the non-contact type suction holding device, and the pressing means holds the wafer (W) substantially flat by pressing upward the lower surface center portion of the wafer (W) that is sucked and held by the suction table (2).</p> |
