PROPORTIONAL CONTROL VALVE WITH PZT ACTUATOR

摘要

A proportional control valve with a PZT actuator is provided to adapt the proportional control valve to a semiconductor industry and a home automation field as well as a general industry through a simple structure. A proportional control valve with a PZT actuator includes a valve body(7), a poppet(20), a poppet seat(23), a balance spring(22), a diaphragm(24), a control nozzle(2), and a controller(15). The valve body has an inlet port disposed at one side thereof and an outlet port disposed at the other side. The poppet is seated on the poppet seat. The balance spring is disposed at a load response part(25) to be fixed to a lower part of the poppet. The diaphragm is coupled to an upper part of the poppet to be connected to the control nozzle. The controller is disposed to be connected to the PZT actuator and power supply terminals(16a,16b) to control an amount of fluid in proportion to a voltage applied to the PZT actuator.