| 摘要 |
A cleaning member and a probe apparatus are provided to enhance efficiency of cleaning and to restrain the short between adjacent probes due to the fiber of the cleaning member. A cleaning member includes a base part and a brush. The brush is composed of a plurality of fibers(122), wherein the plurality of fibers are formed on the base part. The cleaning member is used for performing a cleaning process on a probe. A plurality of trenches(122A) are formed along a peripheral portion of the fiber. The plurality of trenches are formed in the outer circumference of a fiber along the lengthwise. The cross-section of the fiber is formed like a leaf type structure. The fiber is made of an insulating plastic fiber.
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