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发明名称
晶圆保持体及包含该晶圆保持体之晶圆探针仪
摘要
本发明之目的在于提供可藉提高探针仪之升温速度及均热性而提高生产率之晶圆保持体(100)及包含该晶圆保持体之晶圆探针仪。本发明之晶圆保持体(100)之特征在于其系在夹盘顶(2)之表面含有夹盘顶导体层(3),在夹盘顶(2)之形成该夹盘顶导体层(3)之部分以外之部分含有发热体(6)者,而该发热体(6)之存在之区域之最大外径1系小于夹盘顶(2)之直径L,且以该夹盘顶(2)之厚度t及所检查之晶圆之直径W1可满足1+4t>W1之关系之方式,设定该最大外径1及该厚度t者。
申请公布号
TW200725777
申请公布日期
2007.07.01
申请号
TW095128739
申请日期
2006.08.04
申请人
住友电气工业股份有限公司
发明人
粟津知之;板仓克裕;夏原益宏;仲田博彦
分类号
H01L21/66(2006.01);H01L21/683(2006.01)
主分类号
H01L21/66(2006.01)
代理机构
代理人
陈长文
主权项
地址
日本
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