| 摘要 |
A process bath mounted with a substrate guide is provided to reduce the size of the entire cleaning bath by reducing the size of a sink bath surrounding a process bath. A substrate guide(300) on which a substrate is placed directly installed in a process bath(100) to which a cleaning solution or deionized water for cleaning the substrate placed on the substrate guide is supplied. The substrate guide can be installed in the bottom surface or the inner surface of the process bath. At least a pair of fixing brackets(120a,120b) are fixed to the process bath, and the substrate guide is detachably installed in the fixing bracket.
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