发明名称 ALIGNMENT DEVICE
摘要 An aligning apparatus is provided to reduce human errors and exactly examine accuracy of preset components by determining a border according to a difference between brightness and darkness of an alignment mark and automatically calculating a reference value through the border. A border position determining unit(10) determines a border position of an alignment mark formed on a surface of a component. A reference value calculating unit(20) calculates a reference value of the alignment mark according to the determined result of the border position determining unit. An aligning unit(30) aligns the components according to the calculated result of the reference value calculating unit. The border position determining unit determines the border position according to a difference between brightness and darkness generated in a border of the alignment mark and around the alignment mark.
申请公布号 KR20070067917(A) 申请公布日期 2007.06.29
申请号 KR20050129443 申请日期 2005.12.26
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM, GI TAE;LEE, JIN SUN;LEE, JUN YOUNG;KIM, JUNG HYEON
分类号 H01L21/68 主分类号 H01L21/68
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