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发明名称
FUNDAMENTAL CELL, SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE, WIRING METHOD AND WIRING APPARATUS
摘要
申请公布号
KR100732923(B1)
申请公布日期
2007.06.29
申请号
KR20010058644
申请日期
2001.09.21
申请人
发明人
分类号
H01L21/822;H01L27/118;H01L21/82;H01L27/04
主分类号
H01L21/822
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