| 摘要 |
An apparatus for removing the contamination from a rotation roll is provided to reduce the running cost of a coating treatment unit such as a resist coating treatment unit and the like. A support block(110) is mounted on a rotation roll(90). A contact member is installed at the inside of the support block and contacted with the outer circumference of the rotation roll by a ring shape. The support block is moved freely toward the shaft direction of the rotation roll by a moving element(120) so that the surface contamination of the rotation roll is scratched by the contact member. The contact member is moved to the other end of the rotation roll and offers a technique for reducing the washing solution for washing the rotation roll. A washing nozzle injects the washing solution to the upper surface of the rotation roll. |
