发明名称 DEVICE FOR ADJUSTING GAP OF ROLL BRUSH
摘要 An apparatus for adjusting an interval of a roll brush is provided to guarantee a lower receiving part under a bath by eliminating the necessity for an additional up/down cylinder for preventive maintenance of equipment. Upper and lower roll brushes(R1,R2) are installed in a bath, separated from each other. A substrate passes through a space between the upper and the lower roll brushes. Both ends of the upper and lower roll brushes are supported by a pair of rotation support parts(110,120), capable of rotating. Each rotation support part is elevated finely or enormously elevated by a pair of elevation units(200,300) including a first and second elevation units. The first elevation unit finely elevates the rotation support part by a spiral manipulation. The second elevation unit enormously elevates the rotation support part by a phase manipulation of a planar cam(222).
申请公布号 KR20070067942(A) 申请公布日期 2007.06.29
申请号 KR20050129495 申请日期 2005.12.26
申请人 K.C.TECH CO., LTD. 发明人 LIM, SOK TAEK
分类号 H01L21/304;H01L21/02 主分类号 H01L21/304
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