发明名称 DEVICE FOR TRANSFERRING CASSETTE AND METHOD FOR TRANSFERRING THE SAME
摘要 An apparatus and a method for transferring a cassette are provided to place the cassette on an exact position of a transfer apparatus when the cassette is inserted into or sent out of a cleaner. A cassette transfer(500) includes sliding units(510,520,530), supporting members(550a), and a sensor(550b). Sliding units transfer a cassette(10). Supporting members are formed on the sliding units. The cassette is placed on the supporting member. The sensor detects whether the cassette is placed. The supporting members on which the cassette is placed are formed at four points of the sliding units. The sensors are arranged on the two opposite points of the four points. The sensor is one of a neighboring sensor, a pressure sensor, and a photo sensor.
申请公布号 KR20070068198(A) 申请公布日期 2007.06.29
申请号 KR20050130038 申请日期 2005.12.26
申请人 LG.PHILIPS LCD CO., LTD. 发明人 LEE, YONG SEOK
分类号 H01L21/68 主分类号 H01L21/68
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