发明名称 A METHOD OF FABRICATING A MICROFLUIDIC DEVICE AND A MICROFLUIDIC DEVICE FABRICATED BY THE SAME
摘要 A method of fabricating a micro-fluidic device and a micro-fluidic device fabricated by the same are provided to fabricate the micro-fluidic device constructing two substrates with high efficiency in mass production. A method of fabricating a micro-fluidic device includes the steps of: stacking a support layer on a surface opposite to a surface coated with an adhesion material; coating a first substrate(10) on which a fluid port is formed with the adhesion material to form an adhesion layer; arranging a second substrate(20) on which a minute structure is formed on a surface of the adhesion layer of the first substrate coated with the adhesion layer so that the minute structure faces the fluid port; and heating the first substrate and the second substrate at a temperature ranging from 50 degrees to 180 degrees. The support layer is UV or blue tape. The adhesion material is negative photoresist material.
申请公布号 KR20070067988(A) 申请公布日期 2007.06.29
申请号 KR20050129584 申请日期 2005.12.26
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 HWANG, KYU YOUN;JEONG, SUNG YOUNG;KIM, JOON HO;LEE, HUN JOO;LIM, HEE KYUN
分类号 B81C1/00;B81B1/00;B81B7/00;G01N35/10 主分类号 B81C1/00
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