A METHOD OF FABRICATING A MICROFLUIDIC DEVICE AND A MICROFLUIDIC DEVICE FABRICATED BY THE SAME
摘要
A method of fabricating a micro-fluidic device and a micro-fluidic device fabricated by the same are provided to fabricate the micro-fluidic device constructing two substrates with high efficiency in mass production. A method of fabricating a micro-fluidic device includes the steps of: stacking a support layer on a surface opposite to a surface coated with an adhesion material; coating a first substrate(10) on which a fluid port is formed with the adhesion material to form an adhesion layer; arranging a second substrate(20) on which a minute structure is formed on a surface of the adhesion layer of the first substrate coated with the adhesion layer so that the minute structure faces the fluid port; and heating the first substrate and the second substrate at a temperature ranging from 50 degrees to 180 degrees. The support layer is UV or blue tape. The adhesion material is negative photoresist material.