| 摘要 |
PROBLEM TO BE SOLVED: To provide a position adjusting mechanism capable of easily setting a sample to be faced to the tip of a probe in the axial direction of the probe. SOLUTION: A shift amount of the sample 16 to the probe 42 is confirmed along an X-direction from a reflection image of a mirror 44 provided in an X-directional side way, as to the sample 16 and the probe 42 on a sample block 14, and a shift amount of the sample 16 to the probe 42 is confirmed along a Y-direction from a reflection image of a mirror 50 provided in a Y-directional side way, as to the sample 16 and the probe 42 on the sample block 14. The sample block 14 is moved along the X-direction and the Y-direction until the sample 16 is overlapped with the tip of the probe 42, based on confirmation results therein, to oppose the sample 16 to the tip of the probe 42 along the axial direction of the probe 42. COPYRIGHT: (C)2007,JPO&INPIT
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