| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray CT apparatus capable of synthesizing CT images while maintaining accuracy and of exactly obtaining three-dimensional information about the whole of a sample by synthesizing a plurality of three-dimensional images with high accuracy even when photographing the sample being partially magnified. SOLUTION: A cylindrical frame 20 containing the sample W is disposed on a rotating table 3, and one or more grooves 21a, 21b and 21c are formed on the frame 20 so as to extend in a direction approximately perpendicular to the rotation axis R in the state that the frame 20 is mounted on the rotating table 3. In respective partial photographing operations, a region containing any one of the grooves 21a, 21b and 21c is made included in an overlapping section of each photographing area, and an image is synthesized such that each of the grooves 21a, 21b and 21c is made coincident with another when synthesizing each three-dimensional image, thereby enabling the synthetic accuracy to be improved. COPYRIGHT: (C)2007,JPO&INPIT
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