| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a carrier device and an exposure device by which a plurality of masks can be efficiently recovered and distributed from the exposure device. <P>SOLUTION: A spacer 20 is arranged between a plurality of masks M on which a pattern P is formed, respectively, to carry, so that a gap can be made in order that the pattern P of the mask M is not be damaged by the spacer 20 when they are piled. Thereby the masks can be carried in a compact manner, and a plurality of the masks M can be recovered at once and distributed at once, consequently the carrying time is significantly shortened and operation rate of the device using the mask M can be improved. <P>COPYRIGHT: (C)2007,JPO&INPIT |
