MODEL CREATION DEVICE, MODEL CREATION SYSTEM AND ABNORMALITY DETECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a model creation device used when a plurality of areas are set on a target article for a process wherein a processing target position sequentially moves on the target article.

SOLUTION: This model creation device has: a first input part for inputting process state information; a second input part for inputting examination result information; a characteristic amount extraction means extracting a process characteristic amount from the process state information in each the area; and an analysis means creating a process-quality model by executing analysis by data mining by use of the associated process characteristic amount and the examination result information. The model creation device also has a third input part for inputting process position information such that the process position information can be associated with the process state information; and a fourth input part for inputting examination position information such that the examination position information can be associated with the examination result information. The process characteristic amount extraction means has an examination result association means extracting the process characteristic amount in each the area, and associating the examination result information and the process state information corresponding to the same area. The analysis means executes the analysis by use of the examination result information and the process characteristic amount.

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