| 摘要 |
PROBLEM TO BE SOLVED: To provide a locking mechanism for a stage device, the locking mechanism being designed such that its structure is simple and inexpensive, an increase in the size of the stage device can be minimized, and the rotation of stage plates can be restricted. SOLUTION: The locking mechanism includes: a magnetic force generating member 106 fixed to a fixing member 102 integrated with a fixing support substrate 32; magnetic bodies 112 fixed to the stage plates 60 and 61 and attracted by the magnetic force generating member; and driving means 31, 32, MX, MY, CX, CYA, and CYB used to selectively moving the stage plates between a locking position where the magnetic force generating member and the magnetic body are close to each other to thereby block the movement of the stage plates by attracting force acting between them and an unlocking position where the magnetic force generating member and the magnetic body are separated and the attracting force for blocking the movement does not act between them. COPYRIGHT: (C)2007,JPO&INPIT |
