发明名称 Nanostructure-based package interconnect
摘要 An embodiment of the present invention is an interconnect technique. A nanostructure bump is formed on a die. The nanostructure bump has a template defining nano-sized openings and metallic nano-wires extending from the nano-sized openings. The die is attached to a substrate via the nanostructure bump.
申请公布号 US2007148949(A1) 申请公布日期 2007.06.28
申请号 US20050315532 申请日期 2005.12.22
申请人 INTEL CORPORATION 发明人 SUH DAEWOONG;RARAVIKAR NACHIKET R.
分类号 H01L21/44 主分类号 H01L21/44
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