| 摘要 |
A method of scanning is disclosed comprising, providing a scanning system ( 10 ) having a sample holder ( 14 ) and a relatively movable scanning device ( 18 ), performing a scan of at least a part of an object ( 22 ) located on the sample holder ( 14 ), establishing orientation of the sample holder and interpreting data from a scan using the orientation whereby, the orientation is established using data from the scan of the surface of the sample holder. The orientation may be established by defining a plane ( 56 b) of the sample holder, which may be limited by boundaries ( 76 a, 76 b).
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