Production method of curved-surface metal mold having fine uneven structure and production method of optical element using this metal mold

摘要

A method of easily manufacturing a metal mold able to add an antireflection structure to a lens or the like having a complicated surface shape such as an aspherical lens. The method comprises the steps of forming a silicon dioxide film (SiO₂) film ( 2 ) on a curved-surface base substrate ( 1 ) formed in a specified shape, etching the silicon dioxide film (SiO₂) film ( 2 ) using a resist mask ( 3 ) to form a specified shaped antireflection structure pattern, bonding a metal used for the metal mold ( 4 ) onto a silicon dioxide film (SiO₂) film ( 21 ) on which this antireflection film pattern is formed to transfer the antireflection film pattern onto the metal used for the metal mold ( 4 ), and then re-moving the silicon dioxide film (SiO₂) film to form a metal mold ( 4 a) having an antireflection structure on the curved surface.