| 摘要 |
An elastomeric stamp ( 10 ) for printing a pattern on a substrate ( 500 ) with an ink ( 520 ) is at least partially formed from a first material such as PDMS. The stamp comprises a first surface ( 12 ) in a first plane, a second surface ( 14 ) in a second plane and a third surface ( 16 ) extending from the first surface ( 12 ) to the second surface ( 14 ). The first surface ( 12 ) typically forms to the contact surface of a protruding feature of the stamp ( 10 ), whereas the third surface ( 16 ) typically forms the edge of such a feature. The first surface ( 12 ) comprises a barrier layer ( 22 ) being substantially impermeable to the ink ( 520 ). Optionally, the second surface ( 14 ) may carry a further barrier layer ( 24 ) to suppress gas phase diffusion of the ink ( 520 ). In contrast, the third surface ( 16 ) is permeable to the ink ( 520 ). Consequently, a stamp ( 10 ) is obtained that is highly suitable for edge transfer lithography type patterning. The first material of the stamp serves as an ink reservoir, thus reducing the re-inking frequency of the stamp, and the layer ( 22 ) prevents unwanted diffusion of the ink ( 520 ) to the areas of the substrate ( 500 ) into contact with the stamp ( 10 ), thus 20 improving the feature definition on the substrate surface. |
