| 摘要 |
<P>PROBLEM TO BE SOLVED: To secure a filter plate without using adhesive. <P>SOLUTION: A filter plate 55 has an inside region 61 in which a plurality of holes 54a are formed, and an annular region 62 surrounding the inside region 61 in which a plurality of holes 54b are formed. A channel forming member 11 has a recess 51 opposing the inside region 61, and an annular surface 53 formed around the recess 51 oppositely to the annular region 62. An enlarged protrusion 56 having a diameter larger than that of the hole 54b is formed on the upper surface of the filter plate 55 filling and exceeding the plurality of holes 54b in the annular region 62 of the annular surface 53. <P>COPYRIGHT: (C)2007,JPO&INPIT |
