| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating liquid for forming an insulating film having good film properties such as dielectric constant and mechanical strength, an insulating film produced by using the coating liquid and having good film properties such as dielectric constant and mechanical strength, and an electronic device having the insulating film. SOLUTION: The invention provides a film-forming composition containing a compound having a cage structure and essentially free from aromatic hydrocarbon structure, an insulating film formed by using the film-forming composition and essentially free from aromatic hydrocarbon structure, and an electronic device having the insulating film. COPYRIGHT: (C)2007,JPO&INPIT
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