| 摘要 |
PROBLEM TO BE SOLVED: To avoid or reduce the defects of the conventional art and improve handling of separated parts and/or the substrate after separation. SOLUTION: The present invention relates to an improved method of manufacturing a plurality of parts (30) from a plate-like substrate (20). The method includes a step of laterally separating the parts (30) from the plate-like substrate (20) fixed on a first vacuum plate (3), a step of sucking the parts (30) to the first vacuum plate (3), and a step of removing the separated parts (30) from the first vacuum plate (3). COPYRIGHT: (C)2007,JPO&INPIT |
