| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring method of the oxidation degree, a degree of nitriding, thermal conductivity and composition ratio, capable of inexpensively measuring the oxidation degree, the degree of nitriding, the thermal conductivity and the composition ratio, with respect to the thin film formed on a substrate or a self-support thin sheet, especially capable of measuring the thermal conductivity of degree level that is the same or lower than the measurement sensitivity in the measurement of the thermal conductivity. SOLUTION: In the method for measuring various characteristics of the thin film, formed on the substrate or the self-support thin sheet, a member wherein a measuring target material is added to a material, having known thermal conductivity that is higher than the thermal conductivity of the measuring target material, is used to measure the oxidation degree, degree of nitriding, thermal conductivity and a composition ratio of the measuring target material. COPYRIGHT: (C)2007,JPO&INPIT
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