发明名称 Method of Manufacturing CMOS Image Sensor
摘要 A CMOS image sensor and a method of manufacturing the same are provided. The method is capable of reducing a distance between a micro-lens and a photodiode and simplifying the manufacturing process for the CMOS image sensor. In an embodiment, the interlayer dielectric layers of high level metal lines (e.g. third level and higher metal lines) can be selectively removed from the sensing section of a semiconductor substrate. The color filter layers and microlenses can be formed on the sensing section after the interlayer dielectric layers of the high level metal lines have been selectively removed.
申请公布号 US2007145419(A1) 申请公布日期 2007.06.28
申请号 US20060616301 申请日期 2006.12.27
申请人 PARK IN S 发明人 PARK IN S.
分类号 H01L27/148;H01L27/14;H01L27/146;H04N5/335;H04N5/359;H04N5/369;H04N5/374 主分类号 H01L27/148
代理机构 代理人
主权项
地址