Horn, horn unit, and bonding apparatus using same

摘要

A horn that can suppress oscillation components other than the component in the horizontal direction, a horn unit, and a bonding apparatus using same are provided. In the horn 50 in accordance with the present invention, oscillations are applied by an oscillator 42. The horn 50 has a cross-section variable section 54 in which a cross section perpendicular to the lengthwise direction (X direction) of the horn 50 has a first region A 1 extending in the Z direction and a pair of second regions A 2 sandwiching the first region A 1 from the direction (Y direction) perpendicular to the Z direction. In the position P 3 corresponding to an anti-node of a standing wave of oscillations excited in the horn 50, a sectional area S₁ of the first region A 1 assumes a maximum and a sectional area S₂ of the second region A 2 assumes a minimum. With a transition from the position P 3 corresponding to an anti-node of the standing wave to positions P 2, P 4 corresponding to nodes, the sectional area S₁ of the first region Al decreases and the sectional area S₂ of the second region A 2 increases. As a result, oscillation components other than those in the X direction are suppressed.