| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acceleration sensor element having high detection sensitivity, capable of measuring accurate acceleration, and an acceleration sensor equipped with the acceleration sensor element, capable of being miniaturized and thinned. <P>SOLUTION: The acceleration sensor element 10 comprising a crystal and having the thickness in the Z-axis direction is formed on a crystal substrate 20 developed in the orthogonal XY-plane. In the element 10, a dual tuning folk type vibrating reed 30 whose pair of vibrating arms 31, 35 are extended in the Y-axis direction is formed on a thin walled part of a bottom part of a recessed part 28 of the crystal substrate 20, and in the case where an acceleration in the Z-axis direction is applied when the dual tuning folk type vibrating reed 30 is bent and vibrated, an acceleration is detected from a change of a resonance frequency generated by bending of the dual tuning folk type vibrating reed 30 in the Z-direction. <P>COPYRIGHT: (C)2007,JPO&INPIT |
