| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method for forming an alignment layer to make the alignment direction of an alignment layer uniform. SOLUTION: The apparatus 10 for forming an alignment layer has an ion source 12 generating an ion beam 28 and one or more masks 20 disposed between a substrate 24 and the ion source 12, wherein the mask 20 has a reflective surface 34 in the substrate side. The ion beam 28 is reflected between a thin film 26 being an alignment layer on the substrate and the reflective surface 34 of the mask 20, and the alignment layer is formed by the ion beam with which the thin film 26 is finally irradiated. The alignment direction of the liquid crystal can be made uniform by the shape and layout of the reflective face of the mask. Therefore, a liquid crystal display device with no irregular brightness or colors can be manufactured. COPYRIGHT: (C)2007,JPO&INPIT
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