| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an independently operated polyfunctional element by selectively forming responsive films to the surfaces of a plurality of circulation routes, in a sensitive film-forming process for forming the sensitive films to the surface of a spherical surface acoustic wave element. SOLUTION: The spherical surface acoustic wave element is constituted, by providing an electroacoustic conversion element for exciting and detecting a surface acoustic wave and the sensitive films changed in propagation state, according to the environmental change on the surface of a three-dimensional base material having a spherical surface, which has a plurality of annular routes enabling circulation of the surface acoustic wave and having receiving electrodes in the respective routes, independently, and characterized in that the patterns of the sensitive film are different by each route. COPYRIGHT: (C)2007,JPO&INPIT
|
