| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluorescence X-ray analyzer capable of suppressing the generation of higher-order diffracted X rays or escape peaks and to accurately and precisely perform analysis. SOLUTION: The fluorescent X-ray analyzer is equipped with an X-ray source 1 for irradiating a sample S with primary X rays 2, a multilayered film spectral element 3, of which the periodic length for spectrally diffracting the fluorescent X rays 4 emitted from the sample S is 1-2 nm and which is characterized in that the roughnessσof the boundary surface 34 of the reflecting layer and a spacer layer is 20% or higher, with respect to the periodic length and a detector 5 for measuring the intensities of the fluorescent X rays 4 that have been spectrally diffracted by the multilayer film spectral element 3. COPYRIGHT: (C)2007,JPO&INPIT
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