摘要 |
PROBLEM TO BE SOLVED: To provide an ammonia gas sensor constituted so as to well keep the gas selectivity with respect to an ammonia gas component to precisely detect the ammonia gas component even if the ammonia gas component and another gas component exist in a gas to be detected by using a solid ultrahigh strong acid substance as a sensor forming material and sealing an electrode against the gas to be detected. SOLUTION: A sealing layer 40 is formed on the surface region on the electrode side of a substrate 10 so as to cover a pair of electrodes 20 and 30. A sensing layer 50 is formed on the sealing layer 40 using the solid ultrahigh strong acid substance. COPYRIGHT: (C)2007,JPO&INPIT
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