发明名称 |
FUEL CELL PLANARLY INTEGRATED ON A MONOCRYSTALLINE SILICON CHIP AND PROCESS OF FABRICATION |
摘要 |
A fuel cell is entirely fabricated on a single monocrystalline silicon substrate, and substantially overcomes leak proofing and wafer bonding difficulties and criticalities while ensuring an intrinsic sturdiness of the planarly integrated functional structure of the fuel cell. The integrated fuel cell is formed in an oxidized porous silicon region on a monocrystalline silicon substrate that is pervious to fluid flow and is electrically nonconductive with the monocrystalline silicon substrate.
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申请公布号 |
US2007148527(A1) |
申请公布日期 |
2007.06.28 |
申请号 |
US20060611521 |
申请日期 |
2006.12.15 |
申请人 |
STMICROELECTRONICS S.R.L. |
发明人 |
SICILIANO SIMONE A.;LA MAGNA LUIGI;LEONARDI SALVATORE |
分类号 |
H01M8/02;B05D5/12;C25D3/00;C25D5/02;H01M4/86;H01M4/88 |
主分类号 |
H01M8/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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