发明名称 |
METHOD OF FORMING CARBON FIBERS USING METAL-ORGANIC CHEMICAL VAPOR DEPOSITION |
摘要 |
A method of forming carbon fibers at a low temperature below 450° C. using an organic-metal evaporation method is provided. The method includes: heating a substrate and maintaining the substrate at a temperature of 200 to 450° C. after loading the substrate into a reaction chamber; preparing an organic-metal compound containing Ni; forming an organic-metal compound vapor by vaporizing the organic-metal compound; and forming carbon fibers on the substrate by facilitating a chemical reaction between the organic-metal compound vapor and a reaction gas containing ozone in the reaction chamber.
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申请公布号 |
US2007148451(A1) |
申请公布日期 |
2007.06.28 |
申请号 |
US20060550121 |
申请日期 |
2006.10.17 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
PARK SUNG-HO;LEE MYOUNG-JAE;KOO JUNE-MO;SEO BUM-SEOK |
分类号 |
B32B9/00;C23C16/00 |
主分类号 |
B32B9/00 |
代理机构 |
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地址 |
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