SCANNING PROBE APPARATUS AND DRIVE STAGE THEREFOR

摘要

A drive stage, for driving a sample or a probe, capable of ensuring a movable range of a movable portion as a counterweight and always effectively canceling an inertial force to suppress vibration of a supporting member leading to vibration of the sample or the probe includes a counter drive element for moving the probe or a sample holding table and a movable portion movable in a direction in which the inertial force generated during movement of the probe or the sample holding table. The movable portion surrounds the counter drive element outside the counter drive element.