| 摘要 |
<P>PROBLEM TO BE SOLVED: To materialize an XY stage for automatically detecting a rotating direction and a rotation angle of a slider part by providing a laser interferometer itself with the function of detecting an initial position rotation. <P>SOLUTION: This XY stage comprises the laser interferometer and a bar mirror for reflecting an irradiation beam of the laser interferometer. The laser interferometer and the bar mirror make relative movement according to the movement of the slider part. The XY stage two-dimensionally controls the position of the slider part on a platen, with the position of the slider part detected by the laser interferometer. The XY stage is equipped with a rotation detection means for detecting the beam reflected by the bar mirror to detect a rotation of the slider part from the detected beam. <P>COPYRIGHT: (C)2007,JPO&INPIT |
