| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibrating reed capable of heightening detection sensitivity of angular velocity without lowering an excitation efficiency in a driving mode. <P>SOLUTION: This vibrating reed 10 comprising a piezoelectric material, having thickness in the Z-axis direction, and developed in a plane including the orthogonal X-axis and Y-axis is equipped with a beam part 50 extended in the X-axis direction; a pair of driving arms 20, 30 extended from the beam part 50 vertically in the Y-axis direction, and having a driving electrode; a detection arm 40 extended from the beam part 50 vertically in the Y-axis direction, having a detection electrode, and positioned on the center of the pair of driving arms 20, 30; and a base part 60 continuous to the beam part 50, wherein an electrode terminal to which each of the driving electrode and the detection electrode is connected is provided on the main surface 60a. When the driving arms 20, 30 are bent and vibrated in the X-axis direction at a stationary time and angular velocity is applied, torsional vibration is induced by a Coriolis force in the detection arm 40, and the charge generated by the torsional vibration is detected. <P>COPYRIGHT: (C)2007,JPO&INPIT |
